{"id":14108,"date":"2023-04-20T08:39:51","date_gmt":"2023-04-20T00:39:51","guid":{"rendered":"https:\/\/printaker.com\/insphere-technology\/?p=14108"},"modified":"2026-04-10T12:33:02","modified_gmt":"2026-04-10T04:33:02","slug":"introduction-to-gem300-standards","status":"publish","type":"post","link":"https:\/\/www.inspheretechnology.com\/zh\/introduction-to-gem300-standards\/","title":{"rendered":"\u4ec0\u4e48\u662f GEM300\uff1fSEMI 300mm \u6807\u51c6\u5165\u95e8\u6307\u5357"},"content":{"rendered":"<div data-elementor-type=\"wp-post\" data-elementor-id=\"14108\" class=\"elementor elementor-14108\" data-elementor-post-type=\"post\">\n\t\t\t\t<div class=\"elementor-element elementor-element-30947f4 e-con-full e-flex qodef-elementor-content-no e-con e-parent\" data-id=\"30947f4\" data-element_type=\"container\">\n\t\t\t\t<div class=\"elementor-element elementor-element-2555b9c content-txt elementor-widget elementor-widget-text-editor\" data-id=\"2555b9c\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t\t\t\t\t\t<p>GEM300 \u662f\u5957\u00a0<a href=\"https:\/\/www.semi.org\" target=\"_blank\" rel=\"noopener\">\u534a\u5bfc\u4f53\u00a0<\/a>\u4e00\u5957\u4f7f 300 \u6beb\u7c73\u534a\u5bfc\u4f53\u5de5\u5382\u80fd\u591f\u81ea\u52a8\u5316\u7269\u6599\u642c\u8fd0\u548c\u8bbe\u5907\u63a7\u5236\u7684\u6807\u51c6\u3002\u5efa\u7acb\u5728 SECS\/GEM (SEMI E5 SECS-II \u548c SEMI E30 GEM) \u4e4b\u4e0a\uff0cGEM300 \u589e\u52a0\u4e86\u5bf9\u8f7d\u4f53\u7ba1\u7406\u3001\u886c\u5e95\u8ddf\u8e2a\u3001\u63a7\u5236\u4f5c\u4e1a\u548c\u5de5\u827a\u4f5c\u4e1a\u7684\u652f\u6301\u3002.<\/p><p>\u672c\u6307\u5357\u5c06\u89e3\u91caGEM300\u662f\u4ec0\u4e48\uff0c\u4e3a\u4ec0\u4e48\u9700\u8981\u5b83\uff0c\u4ee5\u53ca\u6838\u5fc3\u6807\u51c6\uff08SEMI E87\u3001E90\u3001E94\u3001E40\u3001E39\uff09\u5982\u4f55\u534f\u540c\u5de5\u4f5c\u4ee5\u5b9e\u73b0\u5168\u81ea\u52a8300mm\u751f\u4ea7\u3002.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-d8aa834 elementor-widget elementor-widget-heading\" data-id=\"d8aa834\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">\u4e3a\u4f55 300mm \u5de5\u5382\u9700\u8981 GEM300<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-bffc902 content-txt elementor-widget elementor-widget-text-editor\" data-id=\"bffc902\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t\t\t\t\t\t<p>\u968f\u7740\u66f4\u5927\u3001\u66f4\u91cd\u7684300\u6beb\u7c73\u6676\u5706\u4ee5\u53ca\u66f4\u5c0f\u82af\u7247\u7ed3\u6784\u7684\u5f15\u5165\uff0c\u624b\u52a8\u7269\u6599\u642c\u8fd0\u53d8\u5f97\u4e0d\u5207\u5b9e\u9645\u4e14\u6613\u4e8e\u9020\u6210\u6c61\u67d3\u3002\u534a\u5bfc\u4f53\u5de5\u5382\u9700\u8981\u901a\u8fc7OHT\uff08\u67b6\u7a7a\u8d77\u91cd\u8fd0\u8f93\uff09\u548cAGV\uff08\u81ea\u52a8\u5bfc\u5f15\u8f66\uff09\u7cfb\u7edf\u5b9e\u73b0\u7269\u6599\u914d\u9001\u7684\u5168\u81ea\u52a8\u5316\u3002.<\/p><p>\u4e3a\u4e86\u652f\u6301\u8fd9\u79cd\u7ea7\u522b\u7684\u81ea\u52a8\u5316\uff0c\u6676\u5706\u5382\u9700\u8981\u6807\u51c6\u5316\u901a\u4fe1\uff0c\u4ee5\u5b9e\u73b0\uff1a<\/p><ul><li>\u8f7d\u5177\u8f93\u9001\u4e0e\u9a8c\u8bc1 (SEMI E87)<\/li><li>\u57fa\u677f\u8ddf\u8e2a\uff08SEMI E90\uff09<\/li><li>\u5904\u7406\u4f5c\u4e1a\u548c\u63a7\u5236\u4f5c\u4e1a\u7ba1\u7406 (SEMI E40, E94)<\/li><li>\u5bf9\u8c61\u751f\u547d\u5468\u671f\u670d\u52a1 (SEMI E39)<\/li><\/ul><p>\u8fd9\u4e9b\u6807\u51c6\u5171\u540c\u6784\u6210\u4e86GEM300\u2014\u2014\u73b0\u4ee3300\u6beb\u7c73\u6676\u5706\u5382\u81ea\u52a8\u5316\u7684\u57fa\u7840\u3002.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-a82697c elementor-widget elementor-widget-heading\" data-id=\"a82697c\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">\u4ec0\u4e48\u662f GEM300\uff1f<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-ac6aa82 content-txt elementor-widget elementor-widget-text-editor\" data-id=\"ac6aa82\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t\t\t\t\t\t<p>GEM300 \u662f\u4e00\u5957 SEMI \u6807\u51c6\uff0c\u7edf\u79f0\u4e3a\u201cSEMI 300mm \u6807\u51c6\u201d\u2014\u2014\u5305\u62ec SEMI E39\u3001SEMI E40\u3001SEMI E87\u3001SEMI E90 \u548c SEMI E94\u3002\u5b83\u4e3a\u5de5\u5382\u4e3b\u673a\u63d0\u4f9b\u4e86\u590d\u6742\u3001\u6807\u51c6\u5316\u7684\u65b9\u6cd5\u6765\u63a7\u5236\u8bbe\u5907\u548c\u81ea\u52a8\u5316\u7269\u6599\u642c\u8fd0\u3002.<\/p><p>GEM300 \u57fa\u4e8e SECS\/GEM\uff08SEMI E30 GEM \u548c SEMI E5 SECS-II\uff09\u6784\u5efa\uff0c\u5982\u4e0b\u56fe\u6240\u793a\uff1a<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-e70e5be elementor-widget elementor-widget-image\" data-id=\"e70e5be\" data-element_type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<a href=\"https:\/\/www.inspheretechnology.com\/wp-content\/uploads\/2025\/11\/GEM300-SECS-or-GEM-Standards.jpg\" data-elementor-open-lightbox=\"yes\" data-elementor-lightbox-title=\"GEM300 SECS or GEM Standards\" data-e-action-hash=\"#elementor-action%3Aaction%3Dlightbox%26settings%3DeyJpZCI6MTQxMTEsInVybCI6Imh0dHBzOlwvXC93d3cuaW5zcGhlcmV0ZWNobm9sb2d5LmNvbVwvd3AtY29udGVudFwvdXBsb2Fkc1wvMjAyNVwvMTFcL0dFTTMwMC1TRUNTLW9yLUdFTS1TdGFuZGFyZHMuanBnIn0%3D\">\n\t\t\t\t\t\t\t<img fetchpriority=\"high\" decoding=\"async\" width=\"900\" height=\"435\" src=\"https:\/\/www.inspheretechnology.com\/wp-content\/uploads\/2025\/11\/GEM300-SECS-or-GEM-Standards.jpg\" class=\"attachment-full size-full wp-image-14111\" alt=\"GEM300 standards stack - SEMI E87 E90 E94 E40 E39 built on SECS\/GEM\" srcset=\"https:\/\/www.inspheretechnology.com\/wp-content\/uploads\/2025\/11\/GEM300-SECS-or-GEM-Standards.jpg 900w, https:\/\/www.inspheretechnology.com\/wp-content\/uploads\/2025\/11\/GEM300-SECS-or-GEM-Standards-300x145.jpg 300w, https:\/\/www.inspheretechnology.com\/wp-content\/uploads\/2025\/11\/GEM300-SECS-or-GEM-Standards-768x371.jpg 768w\" sizes=\"(max-width: 900px) 100vw, 900px\" \/>\t\t\t\t\t\t\t\t<\/a>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-b1589f3 elementor-widget elementor-widget-heading\" data-id=\"b1589f3\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">GEM300 \u6807\u51c6<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-0d4ad9d content-txt content-table elementor-widget elementor-widget-text-editor\" data-id=\"0d4ad9d\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t\t\t\t\t\t<table class=\"content-tbl\"><tbody><tr><td class=\"content-title\">SEMI \u6807\u51c6<\/td><td class=\"content-title\">\u8bf4\u660e<\/td><td class=\"content-title\">\u76ee\u7684<\/td><\/tr><tr><td>E87<\/td><td>\u627f\u8fd0\u5546\u7ba1\u7406\u89c4\u8303\uff08CMS\uff09<\/td><td>\u7ba1\u7406\u7269\u6599\u7684\u8f93\u9001\u3001\u5904\u7406\u4e0e\u9a8c\u8bc1\uff0c\u786e\u4fdd\u9884\u671f\u7684\u7269\u6599\u5df2\u6b63\u786e\u9001\u8fbe\u8bbe\u5907\u3002<\/td><\/tr><tr><td>E90<\/td><td>\u57fa\u5e95\u8ddf\u8e2a\u7ba1\u7406\u89c4\u8303<\/td><td>\u5b9a\u4e49\u5236\u9020\u8fc7\u7a0b\u4e2d\u57fa\u677f\u7684\u6807\u51c6\u5316\u8ffd\u8e2a\u65b9\u5f0f\uff0c\u5176\u6982\u5ff5\u4e0e E87 \u5bf9\u8f7d\u5177\u7684\u7ba1\u7406\u65b9\u5f0f\u4e00\u81f4\u3002<\/td><\/tr><tr><td>E40<\/td><td>\u5904\u7406\u7ba1\u7406\u89c4\u8303\uff08PJM\uff09<\/td><td>\u6d41\u7a0b\u4f5c\u4e1a\u7ba1\u7406\u6d89\u53ca\u52a0\u5de5\u8d44\u6e90\u5bf9\u7269\u6599\u7684\u52a0\u5de5\u3002\u5176\u529f\u80fd\u662f\u786e\u4fdd\u4ea4\u4ed8\u7ed9\u52a0\u5de5\u6a21\u5757\u7684\u6750\u6599\u662f\u6309\u7167\u6b63\u786e\u7684\u914d\u65b9\u52a0\u5de5\u7684<\/td><\/tr><tr><td>E94<\/td><td>\u63a7\u5236\u4f5c\u4e1a\u7ba1\u7406\uff08CJM\uff09\u89c4\u8303<\/td><td>\u63d0\u4f9b\u5bf9\u5236\u7a0b\u4f5c\u4e1a\u7684\u76d1\u7763\u5c42\u7ea7\u63a7\u5236\uff0c\u4f7f\u4e3b\u673a\u7cfb\u7edf\u80fd\u591f\u7ba1\u7406\u590d\u6742\u7684\u52a0\u5de5\u60c5\u5883\u3002<\/td><\/tr><tr><td>E39<\/td><td>\u7269\u4ef6\u670d\u52a1\u6807\u51c6\uff1a\u6982\u5ff5\u3001\u884c\u4e3a\u4e0e\u670d\u52a1<\/td><td>\u5b9a\u4e49\u5728\u7269\u6599\u5904\u7406\u8fc7\u7a0b\u4e2d\uff0c\u5404\u7c7b\u7269\u4ef6\u5982\u4f55\u88ab\u52a8\u6001\u5efa\u7acb\u4e0e\u5220\u9664\uff0c\u5e76\u89c4\u8303\u7269\u4ef6\u5c5e\u6027\u4e4b\u95f4\u7684\u4ea4\u4e92\u65b9\u5f0f\u3002<\/td><\/tr><\/tbody><\/table>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>","protected":false},"excerpt":{"rendered":"<p>\u5728\u5f00\u53d1 300 \u6beb\u7c73\u6676\u5706\u4e4b\u524d\uff0cSEMI SECS-II E5 \u548c GEM E30 \u662f\u96c6\u6210\u7535\u8def\u5236\u9020\u5546\u901a\u4fe1\u548c\u63a7\u5236\u6676\u5706\u52a0\u5de5\u8bbe\u5907\u7684\u6700\u521d\u6807\u51c6\u3002.<\/p>","protected":false},"author":1,"featured_media":14110,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"content-type":"","footnotes":""},"categories":[39],"tags":[],"class_list":["post-14108","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-insights-analysis"],"_links":{"self":[{"href":"https:\/\/www.inspheretechnology.com\/zh\/wp-json\/wp\/v2\/posts\/14108","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.inspheretechnology.com\/zh\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.inspheretechnology.com\/zh\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.inspheretechnology.com\/zh\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.inspheretechnology.com\/zh\/wp-json\/wp\/v2\/comments?post=14108"}],"version-history":[{"count":23,"href":"https:\/\/www.inspheretechnology.com\/zh\/wp-json\/wp\/v2\/posts\/14108\/revisions"}],"predecessor-version":[{"id":17003,"href":"https:\/\/www.inspheretechnology.com\/zh\/wp-json\/wp\/v2\/posts\/14108\/revisions\/17003"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.inspheretechnology.com\/zh\/wp-json\/wp\/v2\/media\/14110"}],"wp:attachment":[{"href":"https:\/\/www.inspheretechnology.com\/zh\/wp-json\/wp\/v2\/media?parent=14108"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.inspheretechnology.com\/zh\/wp-json\/wp\/v2\/categories?post=14108"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.inspheretechnology.com\/zh\/wp-json\/wp\/v2\/tags?post=14108"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}