FAQs

Helping OEMs and automation teams simplify SECS/GEM, host and legacy integration.

What Is ?

SECS/GEM or GEM300 is the foundational host equipment interface protocol for factory communication. It is a set of SEMI standards (E4, E5, E37, E30) that enables seamless tool-to-host communication with a factory host system.

Our NxSphere® GEM is a SECS/GEM interface software development kit that helps OEMs embed an equipment communication driver directly into their equipment, saving significant development time.

GEM300 refers to a group of SEMI standards (E30, E37, E87, E90, E94, E116) for 300mm wafer fabs. This set of standards is crucial for 300mm tool compliance, covering wafer tracking, carrier management, and process control.

Our NxSphere® GEM300 modules are a GEM300 compliant driver (built on top of NxSphere® GEM) that helps OEMs implement SECS/GEM and SEMI GEM300 standards faster, enabling compliance, quicker acceptance in Tier-1 fabs, and fewer costly integration cycles.

SECS/GEM is the foundational host equipment interface protocol for equipment integration and tool-to-host communication for backend assembly, IC packaging, and the PV Industry. It serves as the base layer for both 200mm and 300mm fabs. GEM300 then builds on this protocol with additional handling and coordination functions specifically for 300mm wafer fabs.

Our NxSphere® GEM and NxSphere® GEM300 products help you achieve full compliance with both SECS/GEM and SEMI GEM300 standards. If your tool is for a 300mm fab, you just need our GEM300 package.

NxSphere® GEM is our flagship SECS/GEM host interface software development kit (SDK) and a robust software solution for automation software. It helps OEMs embed a powerful equipment communication driver directly into their equipment control software, which manages the SECS/GEM protocol. This ensures SEMI-compliant standards and comes with built-in diagnostics, reducing development complexity and speeding up customer acceptance.

NxSphere® GEM300 is our modular add-on for OEMs building equipment for 300mm wafer fabs. It provides a robust GEM300 driver with ready-to-use functionality such as carrier management (E87), process job control (E94), and substrate tracking (E90), helping tools pass fab acceptance tests faster.

NxSphere® GEMBridge is a powerful OPC to SECS/GEM gateway that functions as an industrial protocol bridge. This software solution connects PLC-controller equipment to a factory host via SECS/GEM, making it an ideal solution for OEMs and factories upgrading semi-automated or PLC-only tools without rewriting the machine control software.

NxSphere® EAP is a powerful SECS/GEM host interface software platform, and a key automation software and software solution designed for factories. It simplifies the host equipment interface protocol and the integration of multiple tools into a central MES or factory automation system.

Acting as the ‘last mile’ connection, it ensures seamless, standards-compliant equipment communication and tool-to-host communication.

NxSphere® DEX is our flagship software solution for Legacy Machine Automation.

This specialized all-in-one box enables SECS/GEM communication interface on your old, legacy machines without changing the existing hardware or software on the equipment. It works by tapping the machine’s video output signal and using OCR to capture data available on the machine’s GUI and machine keyboard/mouse input to emulate the RPA automation on the screen.

It’s a key solution for Factory digital transformation because it enables legacy equipment integration without requiring costly hardware retrofits.

Integration

Yes. Our suite of SECS/GEM host interface software solutions specializes in comprehensive equipment integration and legacy equipment integration.

Whether you’re working with new tools or legacy equipment, our automation software—including NxSphere® EAP, GEMBridge, and DEX—can seamlessly integrate them into your host/MES environment.

This provides powerful Legacy Machine Automation and automation software for legacy tools, with minimal disruption to your factory automation system.

We also provide comprehensive EDA integration support for our customers.

Most OEM SECS/GEM integrations with our software solutions, such as NxSphere® GEM or NxSphere® GEM300, are completed in 2-4 weeks (including testing), not months.

Similarly, factory automation software integrations using NxSphere® EAP or legacy equipment integration projects with NxSphere® DEX can be deployed rapidly, depending on their scope and testing cycles.

Industry Standards

Yes—all NxSphere® products are built to comply with relevant SEMI standards.

Our software solutions, from the equipment communication driver to our Modbus to SECS/GEM gateway and GEM300 compliant driver, ensure your equipment meets key standards like: E30 (GEM), E37 (HSMS), E87 (Carrier Management), E90 (Substrate Tracking), E94 (Control Job Management), and E116 (Equipment Performance Tracking). Our products help achieve full 300mm tool compliance and meet the requirements of the SECS/GEM and SEMI GEM300 standards.

Yes. While our expertise and foundational SECS/GEM protocol are rooted in semiconductor fabs, our versatile automation software and industrial protocol bridge apply to many other precision industries. Our solutions, including smart equipment integration and machine connectivity software, are used in electronics manufacturing, medical device production, and other fields that require seamless equipment integration and traceability.

Customer Support

We provide comprehensive post-installation support backed by 15+ years of SECS/GEM and factory automation expertise. Our solutions are proven in over 10,000 installations across 14 countries, ensuring reliability and compliance. After deployment, you’ll have access to scalable, low-code software solutions for both OEMs and factories, along with expert guidance for equipment integration and legacy system upgrades. Our goal is to help accelerate your factory digital transformation with robust, dependable software and ongoing technical assistance every step of the way.

Why choose Insphere?

Insphere Technology delivers over 15 years of SECS/GEM and factory automation experience, proven through 10,000+ installations across 14 countries. We offer scalable, low-code automation software designed for both OEMs and factories, and we excel in integrating new equipment as well as upgrading legacy tools. With a comprehensive suite of automation products, we help streamline your operations, improve interoperability, and drive your factory’s digital transformation with reliable, high-quality solutions.

We offer live demos, proof-of-concept trials, and consultations to help you assess our software solutions. This allows you to see how our automation software can address your specific needs for SECS/GEM and GEM300 implementation and legacy equipment integration. We believe in ensuring our solutions align with your technical and business goals for compliance and seamless tool-to-host communication before you commit to anything.

The right solution depends on your role and project.

  • For OEMs implementing SECS/GEM on new equipment, consider our software solutions like NxSphere® GEM, NxSphere® GEMBridge, and NxSphere® GEM300 to ensure SEMI standards and 300mm tool compliance.
  • For Factory Automation Engineers, simplifying tool-to-host communication, look at NxSphere® EAP.
  • For upgrading older, non-SECS/GEM machines, NxSphere® DEX is the ideal legacy automation solution. It’s a dedicated Legacy Machine Automation and automation software for legacy tools that provides machine connectivity software for seamless legacy equipment integration.

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