NxSphere® GEM300
GEM300 SDK for OEMs to build automation modules for 300mm equipment with SEMI E87, E90, E94, and E116 compliance.
Accelerate Your Path to GEM300 Standards Compliance
NxSphere® GEM300 (formerly known as STHGEM300) is a GEM300 SDK that helps OEMs make their 300mm tools fully SEMI-compliant faster. It supports SEMI E87 (Carrier Management), SEMI E90 (Substrate Tracking), SEMI E94 (Control Job Management), SEMI E116 (Equipment Performance Tracking) and related standards.
Built on NxSphere® GEM, it adds full support for GEM300 standards and automatically handles their state models, handshakes, and interdependencies — including SEMI E39, E40, E37, and E5 base standards.
With its built-in 300mm object model, sample workflows, and persistence support, engineers can focus on tool control while GEM300 manages carrier, job, and substrate coordination and ensures clean host interoperability.
Why OEMs Choose NxSphere® GEM300
- ✓Full GEM300 Standards Support — E87, E40, E90, E94, E116 with automatic state machines, handshakes, and data persistence
- ✓SEMATECH & SELETE Compliant — validated round-trip samples meet SEMATECH and SELETE operational requirements for 300mm fabs
- ✓Auto GEM300 Reference Manual — one-click generation of your complete GEM300 host integration documentation
- ✓Proven & Trusted — built on the solid foundation of NxSphere® GEM, accepted across all 300mm fabs worldwide
Everything You Need for GEM300 Connectivity Standards
A complete GEM300 SDK with automatic state machines for SEMI E87, E90, E94, and E116 — visual object modeling, validated samples, and one-click documentation for 300mm equipment compliance.
Comprehensive Core Features
Inherits the full feature set of NxSphere GEM - events, alarms, recipes, remote commands, spooling, and state models.
Intuitive Object Modeling
Visual Model Builder to orchestrate complex GEM300 logical objects - load ports, substrate locations, processing modules, and more.
Streamlined Standard Integration
Manage complex interdependencies between E87, E90, E94, and E116 standards out of the box.
Automated State Machines
Automatic state machine management and data persistence after restart - no manual state tracking required.
Automated Documentation
One-click GEM300 manual generation for complete host integration specifications.
Seamless Upgrade Path
Upgrade effortlessly from NxSphere GEM SDK to enable full GEM300 capabilities with minimal code changes.
Round-Trip Sample Program & Simulator
NxSphere® GEM300 includes a round-trip sample application and GEM300 Simulator that together demonstrate the complete 300mm workflow — from carrier load to lot completion. A single API call triggers the full cascade of state machines, variable data, and events automatically. The simulator provides pre-built host message templates, so developers can test carrier arrival, job start, substrate tracking, and lot completion without building a host application.
Learn More About NxSphere® GEM300
The SEMI GEM300 standards are powerful but highly complex, requiring careful coordination of carriers, substrates, and process jobs. NxSphere® GEM300 is designed to simplify this journey with clear, developer focused resources. Our Quick Start Guide walks you through the essentials, while the step by-step workflow guide demonstrates how to execute the full roundtrip GEM300 scenario—exactly as defined by SELETE and SEMATECH. A comprehensive Developer Guide covers every detail from material move-in to job control and exception handling, supported by working sample applications that bring the concepts to life.
Programming Interface
C#, VB.NET, Python, gRPC (coming soon)
Multiplatform Support
Microsoft Windows 32-bit and 64-bit
Linux 32-bit and 64-bit
System Requirements
Windows Server 2019/2016/2012 R2; Windows 7/8/10/11; ≥1.3 GHz CPU; 1 GB RAM; 200 MB disk; Ethernet
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FAQ
What is GEM300 and which SEMI standards does it include?
GEM300 is a suite of SEMI standards originally defined to support full 300mm factory automation. At minimum, a GEM300 interface must comply with SEMI E5, E30, E37, E39, E40, E87, E90, and E94. NxSphere® GEM300 also includes SEMI E116 (EPT), E148, and E157.
What is the difference between SECS/GEM and GEM300?
SECS/GEM (SEMI E30) defines base equipment communication — events, alarms, recipes, remote commands. GEM300 adds 300mm-specific standards: SEMI E87 for carrier management, SEMI E90 for substrate tracking, SEMI E94 for control job management, and SEMI E116 for equipment performance tracking.
Does NxSphere® GEM300 support SEMI E142?
Yes. SEMI E142 (Substrate Mapping) is supported at the base NxSphere® GEM level, which NxSphere® GEM300 inherits.
Does NxSphere® GEM300 handle SEMI E87 and E90 state machines automatically
Yes. NxSphere® GEM300 provides automatic state machine management for all GEM300 standards including SEMI E87 carrier states and SEMI E90 substrate states, with data persistence after system restart.
Can I test GEM300 workflows without a real host?
Yes. NxSphere® GEM300 includes a GEM300 Simulator and complete round-trip sample programs compliant with SEMATECH and SELETE operational requirements, allowing you to validate GEM300 flows offline.
Is a free evaluation of NxSphere® GEM300 available?
Yes. NxSphere® GEM300 offers a free 30-day software evaluation with full functionality including SEMI E87, E90, E94, and E116 support.