NxSphere® GEM300
GEM300-Compliant Software for 300mm Equipment Automation (move to below with smaller size)
Accelerate Your Path to GEM300 Standards Compliance
NxSphere® GEM300 (formerly known as STHGEM300) is a GEM300 SDK that helps OEMs make their 300mm tools fully SEMI-compliant faster. It supports SEMI E87 (Carrier Management), SEMI E90 (Substrate Tracking), SEMI E94 (Control Job Management), SEMI E116 (Equipment Performance Tracking) and related standards.
Built on NxSphere® GEM, it adds full support for GEM300 standards and automatically handles their state models, handshakes, and interdependencies, covering SEMI E39, E40, E37, and E5 base standards.
With its built-in 300mm object model, sample workflows, and persistence support, engineers can focus on tool control while GEM300 manages carrier, job, and substrate coordination and ensures clean host interoperability.
Why OEMs Choose NxSphere® GEM300
- ✓Full GEM300 Standards Support: E87, E40, E90, E94, and E116 with automatic state machines, handshakes, and data persistence.
- ✓SEMATECH & SELETE Compliant: Validated round-trip samples meet SEMATECH and SELETE operational requirements for 300mm fabs.
- ✓Auto GEM300 Reference Manual: One-click generation of your complete GEM300 host integration documentation.
- ✓Proven and Trusted: Built on the solid foundation of NxSphere® GEM, accepted across all 300mm fabs worldwide.
As a fully integrated OEM SECS GEM solution, NxSphere® GEM300 gives equipment makers everything they need to qualify faster and ship with confidence.
Everything You Need for GEM300 Connectivity Standards
A complete GEM300 SDK with automatic state machines for SEMI E87, E90, E94, and E116. It includes visual object modeling, validated samples, and one-click documentation for 300mm equipment compliance.
Comprehensive Core Features
Inherits the full feature set of NxSphere GEM, including events, alarms, recipes, remote commands, spooling, and state models.
Intuitive Object Modeling
Visual Model Builder to orchestrate complex GEM300 logical objects, including load ports, substrate locations, processing modules, and more.
Streamlined Standard Integration
Manage complex interdependencies between E87, E90, E94, and E116 standards out of the box.
Automated State Machines
Automatic state machine management and data persistence after restart. No manual state tracking required.
Automated Documentation
One-click GEM300 manual generation for complete host integration specifications.
Seamless Upgrade Path
Upgrade effortlessly from NxSphere® GEM SDK to enable full GEM300 capabilities with minimal code changes.
Round-Trip Sample Program and Simulator
NxSphere® GEM300 includes a round-trip sample application and GEM300 Simulator that together demonstrate the complete 300mm workflow, from carrier load to lot completion. A single API call triggers the full cascade of state machines, variable data, and events automatically. The simulator provides pre-built host message templates, so developers can test carrier arrival, job start, substrate tracking, and lot completion without building a host application.
Your Trusted Worldwide Partner for SECS/GEM Integration
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Learn More About NxSphere® GEM300
The SEMI GEM300 standards are powerful but highly complex, requiring careful coordination of carriers, substrates, and process jobs. NxSphere® GEM300 is designed to simplify this journey with clear, developer-focused resources.
Our Quick Start Guide walks you through the essentials, while the step by-step workflow guide demonstrates how to execute the full roundtrip GEM300 scenario, exactly as defined by SELETE and SEMATECH.
Meanwhile, a comprehensive Developer Guide covers every detail from material move-in to job and exception handling, supported by working sample applications that bring the concepts to life.
Programming Interface
C#, VB.NET, Python, gRPC (coming soon)
Multiplatform Support
Microsoft Windows 32-bit and 64-bit
Linux 32-bit and 64-bit
System Requirements
Windows Server 2019/2016/2012 R2, Windows 7/8/10/11, ≥1.3 GHz CPU, 1 GB RAM, 200 MB RAM, Ethernet
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What Is GEM300 & Why It Matters for 300mm Semiconductor Manufacturing
GEM300 is a suite of SEMI standards that defines how 300mm semiconductor equipment communicates with factory automation systems. It addresses the additional complexity of automated 300mm fabs, where carriers, substrates, and process jobs must be coordinated precisely across equipment, hosts, and material handling systems.
Here’s what GEM300 covers and why it matters for modern semiconductor manufacturing.
Carrier management (SEMI E87)
Defines how equipment manages carrier states, load port access modes, and material handoffs with automated transport systems.
Substrate tracking (SEMI E90)
Provides wafer-level visibility across the production floor, tracking substrate location and status throughout the process flow.
Control job management (SEMI E94)
Coordinates multi-step processing jobs across equipment, linking lot control to process job execution.
Processing job management (SEMI E40)
Manages the creation, execution, and completion of individual process jobs at the equipment level.
Equipment performance tracking (SEMI E116)
Standardizes how equipment reports utilization, availability, and performance metrics to factory host systems.
Fab interoperability
300mm fabs require GEM300 compliance for tool qualification. Without it, equipment cannot be accepted into automated production environments.
Industry 4.0 readiness
As fabs push toward full automation, GEM300 compliance is the prerequisite for connecting tools to MES, AMHS, and smart factory platforms.
Key SEMI Standards Supported by NxSphere® GEM300
NxSphere® GEM300 provides complete coverage of the SEMI standards required for 300mm equipment compliance. Each standard is fully implemented and integrated, with automatic handling of the state models and interdependencies that connect them.
SEMI E5 (SECS-II)
Defines the message content and data structure for SECS communications between equipment and hosts.
SEMI E37 (HSMS)
High-Speed Message Services protocol for TCP/IP-based SECS-II communication.
SEMI E39 (OSS)
Object Services Standard, defining how equipment objects are identified and referenced by host systems.
SEMI E40 (PJM)
Processing Job Management, governing the execution and lifecycle of individual process jobs at the equipment level.
SEMI E87 (CMS)
Carrier Management Standard, defining load port states, carrier IDs, and material handoffs with automated transport systems.
SEMI E90 (STS)
Substrate Tracking Standard, providing wafer-level tracking across the production floor from entry to completion.
SEMI E94 (CJM)
Control Job Management, coordinating multi-step lot processing across equipment and process jobs.
SEMI E116 (EPT)
Equipment Performance Tracking, standardizing how equipment reports utilization, availability, and performance data.
Benefits of Using GEM300-Compliant Software for OEM Equipment
Choosing purpose-built GEM300 software changes the development calculus for OEM engineering teams. Rather than building compliance from the ground up, teams deploy a validated foundation and direct their effort toward the tool capabilities that differentiate their products.
As a trusted SECS GEM software platform, NxSphere® GEM300 gives OEMs the confidence that their tools will pass fab qualification without repeated revision cycles.
Common Use Cases for GEM300 Software
NxSphere® GEM300 supports a wide range of 300mm semiconductor equipment types and integration scenarios. Common applications include:
Additionally, for facilities also managing older tools, our legacy equipment automation solutions complement GEM300 deployments by connecting non-SECS/GEM equipment into the same factory automation environment.
Supporting Smart Factory and 300mm Fab Automation
MES integration
AMHS coordination
SEMI E87 enables direct communication with automated material handling systems, allowing equipment to coordinate carrier handoffs with OHT and AGV systems without manual intervention.
Real-time visibility
Equipment performance data reported through SEMI E116 supports predictive maintenance, utilization tracking, and operational analytics across the fab.
Automated material flow
Load port state management and carrier handoff workflows align precisely with transport system requirements, ensuring smooth, uninterrupted material movement.
Industry 4.0 readiness
GEM300 software gives 300mm tools the communication foundation needed to participate in smart factory platforms, cloud-based monitoring, and data-driven manufacturing initiatives.
Frequently Asked Questions
What is GEM300 and which SEMI standards does it include?
GEM300 is a suite of SEMI standards designed to support full 300mm factory automation. At minimum, a GEM300 interface must comply with SEMI E5, E30, E37, E39, E40, E87, E90, and E94. NxSphere® GEM300 also includes SEMI E116 (EPT), E148, and E157.
What is the difference between SECS/GEM and GEM300?
SECS/GEM (SEMI E30) defines base equipment communication, covering events, alarms, recipes, and remote commands. GEM300 adds 300mm-specific standards, wuch as SEMI E87 for carrier management, SEMI E90 for substrate tracking, SEMI E94 for control job management, and SEMI E116 for equipment performance tracking.
Does NxSphere® GEM300 support SEMI E142?
Yes. SEMI E142 (Substrate Mapping) is supported at the base NxSphere® GEM level, which NxSphere® GEM300 inherits.
Does NxSphere® GEM300 handle SEMI E87 and E90 state machines automatically?
Yes. NxSphere® GEM300 provides automatic state machine management for all GEM300 standards including SEMI E87 carrier states and SEMI E90 substrate states, with data persistence after system restart.
Can I test GEM300 workflows without a real host?
Yes. NxSphere® GEM300 includes a GEM300 Simulator and complete round-trip sample programs compliant with SEMATECH and SELETE operational requirements, allowing you to validate GEM300 flows offline.
Is a free evaluation of NxSphere® GEM300 available?
Yes. NxSphere® GEM300 offers a free 30-day software evaluation with full functionality including SEMI E87, E90, E94, and E116 support.
Why is GEM300 important for 300mm semiconductor equipment?
GEM300 standards define how 300mm equipment communicates with factory hosts, automated material handling systems, and MES platforms. Without GEM300 compliance, tools cannot be qualified for advanced 300mm fabs or participate in fully automated production workflows.
What are the benefits of using GEM300-compliant software?
GEM300-compliant software eliminates the need to build state machines and documentation from scratch, cutting development time significantly. It also ensures validated interoperability with factory hosts, simplifying fab qualification and accelerating time to market for OEM equipment makers.
Can GEM300 integrate with MES and factory host systems?
Yes. GEM300-compliant tools communicate carrier, substrate, and job data directly to MES and factory host systems in real time, enabling end-to-end production traceability, automated scheduling, and process control across the fab floor.
How does GEM300 improve semiconductor factory automation?
GEM300 gives equipment a standardized way to coordinate with automated transport systems, factory hosts, and MES platforms. This enables automated carrier handoffs, real-time substrate tracking, and performance monitoring, reducing manual intervention across 300mm production environments.