OEM Equipment Solutions
Less Code, Faster Launch
Low-code development, accelerating time-to-market.
OEM EQUIPMENT SOLUTIONS
Factories today no longer accept tools without SECS/GEM or GEM300 compliance. However, developing these equipment communication drivers in-house is not only slow but also costly.
NxSphere® GEM and GEM300 are powerful SECS/GEM host interface software and compliant drivers that enable fast, reliable, and fully standardized tool-to-host communication. Designed for semiconductor tool automation, they provide OEMs with ready-made SECS/GEM SDKs and factory automation software, helping you deliver fab-ready tools faster and keep engineering teams focused on innovation.
Our Products
NxSphere® GEM
Overview:
NxSphere® GEM is a robust SECS/GEM driver and host integration software for equipment makers requiring fully SEMI E30, SEMI E37, and E5-compliant communication. Built as a developer-friendly SECS/GEM SDK, it shortens integration time and ensures seamless interoperability between tools and hosts in semiconductor fabs.
Highlights:
Intelligent API for asynchronous SECS/GEM operations.
Full GEM service support: events, alarms, recipes, remote command, data collection, spooling, state model, and the latest Large Recipe (Stream 21).
Visual Model Builder for easy configuration and auto generated documentation. Built-in simulator and SML LogViewer for validation and debugging.
Recommended for:
General semiconductor equipment (200 mm and below).
Backend tools such as Die Bonders, Wire Bonders, AOI, Vision, Laser Markers, Testers, etc.
The foundation for seamless, fab-proven SECS/GEM host communication – smart, scalable, and ready to deploy.
NxSphere® GEM300
Complete 300mm Equipment Automation Made Simple
Overview:
Built on NxSphere® GEM, NxSphere® GEM300 is a comprehensive GEM300-compliant driver supporting full 300mm tool compliance with all major SEMI standards (E87, E90, E94, E40, E116, and more). It simplifies object modeling, process job management, and host coordination for semiconductor tool automation while offering fast deployment and high maintainability.
Highlights:
All features of NxSphere GEM.
Integrated GEM300-compliant driver with object-based modeling.
Automatic state machines with persistence and recovery.
Model Builder for visual configuration and instant documentation.
Recommended for:
300 mm wafer processing tools (Etch, Metrology, CMP, and more).
Tools with automated handling systems (OHT, AGV).
Accelerate fab qualification with a fully-integrated, GEM300-compliant automation platform.
NxSphere® GEMBridge
Unified Gateway Between SECS/GEM and PLC/OPC UA
Overview:
NxSphere® GEMBridge acts as an industrial protocol bridge, connecting PLC, SCADA, or Modbus systems to SECS/GEM factory hosts. It delivers fast, code free PLC-to-SECS/GEM integration, turning PLC-based or hybrid machines into fully SECS/GEM compliant equipment without rewriting control logic.
Highlights:
PLC-to-SECS/GEM and Modbus to SECS/GEM gateway.
Visual tag-to-GEM mapping (status vars, CEIDs, alarms, host commands).
Admin Panel for deployment and monitoring.
One-click documentation generation for SEMI-compliant specs.
Recommended for:
PLC-driven or hybrid tools requiring rapid SECS/GEM enablement through OPC UA mapping.
A no-code, configuration-driven factory integration gateway that connects OPC UA and SECS/GEM effortlessly.