GEM300 is the suite of SEMI standards that enables 300mm semiconductor fabs to automate material handling and equipment control. Built on top of SECS/GEM (SEMI E5 SECS-II and SEMI E30 GEM), GEM300 adds support for carrier management, substrate tracking, control jobs, and process jobs.
This guide explains what GEM300 is, why it became necessary, and how the core standards (SEMI E87, E90, E94, E40, E39) work together to enable fully automated 300mm production.
Why 300mm Fabs Need GEM300
With the introduction of larger and heavier 300mm wafers and smaller chip topologies, manual material handling became impractical and risky for contamination. Semiconductor factories required full automation of material delivery using OHT (Overhead Hoist Transport) and AGV (Automated Guided Vehicle) systems.
To support this level of automation, fabs needed standardized communication for:
- Carrier delivery and validation (SEMI E87)
- Substrate tracking through processing (SEMI E90)
- Process job and control job management (SEMI E40, E94)
- Object lifecycle services (SEMI E39)
These standards collectively form GEM300 — the foundation of modern 300mm wafer fab automation.
What is GEM300?
GEM300 is a suite of SEMI standards collectively known as the “SEMI 300mm Standards” — including SEMI E39, SEMI E40, SEMI E87, SEMI E90, and SEMI E94. It provides a sophisticated, standardized approach for factory hosts to control equipment and automate material handling.
GEM300 is built on top of SECS/GEM (SEMI E30 GEM and SEMI E5 SECS-II) as illustrated below:
GEM300 Standards
| SEMI Standard | Description | Purpose |
| E87 | Specification for Carrier Management (CMS) | Manages the delivery, the handling and the validation of the material. The objective is to validate that the expected material has been delivered to the equipment |
| E90 | Specification for Substrate Tracking Management | Defines a standard means for tracking substrates in manufacturing in the same manner as E87 does for Carriers |
| E40 | Specification for Processing Management (PJM) | Process job management is concerned with the processing of material by a processing resource. It’s function is to ensure that material delivered to the process module is processed with the correct recipe |
| E94 | Specification for Control Job Management (CJM) | Provides a supervisory level of control for Process Jobs on material processing equipment, allowing hosts to manage complex processing scenarios. |
| E39 | Object Services Standard: Concepts, Behavior, and Services | Defines how various types of objects are dynamically created and deleted during material processing. Specifies object attribute interaction |